Product introduction
ECA series are high voltage amplifiers for electrostatic chucks (E-Chuck, ESC). In addition to polarity switching and forced grounding, this series also offers a wafer monitoring system for wafer inspection needs. Additionally, with a wide voltage range, the series supports Coulomb and Johnsen-Rahbek electrostatic chucks.
Typical Application:
Electrostatically driven material handling
Semiconductor Wafer Processing
Non-mechanical transfer of flat sheets or other processed materials sensitive to mechanical handling
Features and Benefits:
Reliable clamp/release state detection by wafer sensor
Fast response of amplifier architecture design ("no relay polarity inversion" design for high reliability and long life.)
"Dual channel independent control (option)" and "center tap voltage setting (option)" for various chuck/release operations
Equipped with LAN, USB, RS-232C digital interface
Built-in low-pass RF filter (13.56 MHz)
Output voltage setting characteristics:
Waveform example:
Optional CT
Center tap bias
0 to ±[maximum rate voltage - voltage set point]
Optional ET
Ethernet CAT interface
[coming soon]
Optional DS
Dual channel independent control
Optional AC
AC 100V to 240V 1 φ input
Optional L7
Output high voltage cable 7m x 3
(2 when CT or DS is selected)
